Coating apparatus – Gas or vapor deposition
Reexamination Certificate
2005-03-07
2009-10-27
Kackar, Ram N. (Department: 1792)
Coating apparatus
Gas or vapor deposition
C118S7230AN, C118S050100, C427S523000, C427S524000, C427S059000
Reexamination Certificate
active
07608151
ABSTRACT:
A method and system for coating the internal surfaces of a localized area or section of a workpiece is presented. Conductive structures are inserted into one or more openings of a workpiece to define the section to be coated. In some embodiments, a bias voltage is connected to a workpiece section, which functions as a cathode. A gas source and vacuum source are coupled to each conductive structure through a flow control system. The flow control system enables a first opening to function as a gas inlet and a second opening to function as a vacuum exhaust. Only the section encompassed by the conductive structures is coated. When the coating process is completed, a means for varying the conductive structures along the length is utilized to move onto the next section to be coated.
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Boardman William John
Contreras Frederick
Mercado Raul Donate
Tudhope Andrew William
Kackar Ram N.
McHugh Terry
Schneck & Schneck
Sub-One Technology, Inc.
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