Method and system for coating internal surfaces of...

Coating processes – Coating by vapor – gas – or smoke – Carbon or carbide coating

Reexamination Certificate

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C427S249100, C427S523000, C427S524000, C427S530000, C427S528000, C427S534000, C427S569000, C204S192300, C204S192320, C118S7230AN, C118S7230ER, C118S708000, C118S663000

Reexamination Certificate

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10891983

ABSTRACT:
The coating of internal surfaces of a workpiece is achieved by connecting a bias voltage such that the workpiece functions as a cathode and by connecting an anode at each opening of the workpiece. A source gas is introduced at an entrance opening, while a vacuum source is connected at an exit opening. Pressure within the workpiece is monitored and the resulting pressure information is used for maintaining a condition that exhibits the hollow cathode effect. Optionally, a pre-cleaning may be provided by introducing a hydrocarbon mixture and applying a negative bias to the workpiece, so as to sputter contaminants from the workpiece using argon gas. Argon gas may also be introduced during the coating processing to re-sputter the coating, thereby improving uniformity along the length of the workpiece. The coating may be a diamond-like carbon material having properties which are determined by controlling ion bombardment energy.

REFERENCES:
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patent: 4714589 (1987-12-01), Auwerda et al.
patent: 5026466 (1991-06-01), Wesemeyer et al.
patent: 5368937 (1994-11-01), Itoh
patent: 5712000 (1998-01-01), Wei et al.
patent: 5879763 (1999-03-01), Sugiyama et al.
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patent: 6488825 (2002-12-01), Hilliard
patent: 6663755 (2003-12-01), Gorokhovsky
patent: 2002/0039626 (2002-04-01), Nakahigashi et al.
patent: 2004/0112536 (2004-06-01), Quon
patent: 63-026373 (1988-02-01), None
patent: 09-195036 (1997-07-01), None
patent: 2001200369 (2001-07-01), None
Machine Translation of 09-195036 dated Jul. 1997.

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