Method and system for calibrating a rotary encoder and...

Details Method and system for calibrating a rotary encoder and... Method and system for calibrating a rotary encoder and...

2006-12-22

2008-08-19

Jeanglaude, Jean B (Department: 2819)

Coded data generation or conversion

Digital pattern reading type converter

Antiambiguity feature

C341S120000

Reexamination Certificate

active

07414547

ABSTRACT:
A calibration system for a rotary encoder comprises a rotary encoder disposed on a manufacturing substrate, the rotary encoder including an encoder pattern. The calibration system also includes a calibration pattern written onto a surface of the substrate, the calibration pattern comprising a ring that includes a grating pattern, where a radial position of the grating pattern corresponds to an error value of the position of the encoder pattern. A method of calibrating the errors of a rotary encoder and a method of fabricating a high resolution rotary encoder on a surface of a manufacturing substrate are also provided.

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Solak, H.H. & David, C.; “Patterning of Circular Structure Arrays with Interference Lithography”,Journal of Vacuum Science Technology B(Nov./Dec. 2003); vol. 21, No. 6; pp. 2883-2887.

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