Electric heating – Metal heating – By arc
Reexamination Certificate
2007-04-03
2007-04-03
Paschall, Mark (Department: 3742)
Electric heating
Metal heating
By arc
C219S121430, C219S121540, C219S121400, C156S345240
Reexamination Certificate
active
10512862
ABSTRACT:
An arc suppression system for plasma processing comprising at least one sensor coupled to the plasma processing system, and a controller coupled to the at least one sensor. The controller provides at least one algorithm for determining a state of plasma in contact with a substrate using at least one signal generated from the at least one sensor and controlling a plasma processing system in order to suppress an arcing event. When voltage differences between sensors exceed a target difference, the plasma processing system is determined to be susceptible to arcing. During this condition, an operator is notified, and decision can be made to either continue processing, modify processing, or discontinue processing.
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Moroz Paul
Strang Eric
Paschall Mark
Tokyo Electron Limited
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