Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate
2006-01-31
2006-01-31
Picard, Leo (Department: 2125)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Product assembly or manufacturing
C700S108000
Reexamination Certificate
active
06993407
ABSTRACT:
A method and a system for analyzing a semiconductor manufacturing process includes a semiconductor manufacturing process that can generate sets of input and output data. Principal components are generated from the set of input data, and a set of principal component score data are determined based on the principal components. A relationship between the sets of input and output data is determined from the principal component score data and the output data. The system includes at least one storage device and a processor. The storage device stores input data and output data from the semiconductor manufacturing process. The processor is coupled to the storage device. The processor determines principal components from the input data, a set of principal component score data based on the principal components, and a relationship between the input and output data from the principal component score data and the output data.
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Duane Morris LLP
Kosowski Alexander J
Picard Leo
Taiwan Semiconductor Manufacturing Company
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