Method and system for analyzing plasma data

Details Method and system for analyzing plasma data Method and system for analyzing plasma data

1994-04-12

1996-08-13

Trammell, James P.

Boots, shoes, and leggings

364498, 36457101, 36457108, G01N 3100

Patent

active

055463223

ABSTRACT:
Analysis of plasma data indicative of gaseous species therein, such as Optical Emission Spectroscopy (OES) data, is aided through the interactive use of a computer. OES data may be calibrated by the computer with minimal input from the user regarding a gas the user knows or suspects is present. The computer then assumes the presence of that gas and assigns relative intensity peaks to known wavelengths for that gas, allowing calibration to take place. Selective identification of particular gases from the data is also possible. Used in conjunction with selective identification, a learning function allows the system to improve the accuracy of future gaseous species identification. Certain characteristics of a particular gas over time, such as intensity at a particular wavelength or at all wavelengths, may also be automatically plotted.

REFERENCES:
patent: 4008388 (1977-02-01), McLafferty et al.
patent: 4093991 (1978-06-01), Christie, Jr. et al.
patent: 4267572 (1981-05-01), Witte
patent: 4365303 (1982-12-01), Hannah et al.
patent: 4493745 (1985-01-01), Chen et al.
patent: 4620284 (1986-10-01), Schnell et al.
patent: 4676868 (1987-06-01), Riley et al.
patent: 5014217 (1991-05-01), Savage
patent: 5059522 (1991-10-01), Harder et al.
patent: 5347460 (1994-09-01), Gifford et al.
Osborn, Brock E., "Statistical Modeling in Manufacturing: Adapting a Diagnostic Tool to Real-Time Applications", IBM J. Res. Dev., vol. 37, No. 4, pp. 491-505, Jul. 1993.
Besag. J., "Spacial Interaction and the Statistical Analysis of Lattice Systems", J. Royal Statistical Soc., 35, pp. 192-236, 1974.
Dempster, A. P., Laird, N. M. and Rubin, D. B., "Maximum Likelihood from Incomplete Data via the EM Algorithm", J. Royal Statistical Soc., 39, pp. 1-38, 1976.
Geman, S. and Geman, D., "Stochastic Relaxation, Gibbs Distributions, and the Bayesian Restoration of Images", IEEE Transactions on Pattern Analysis and Machine Intelligence, vol, PAMI-6, No. 6, pp. 721-742, 1984.
Gerander, U., "Tutorial in Pattern Theory", Division of Applied Mathematics, Brown University, Providence, R.I., Ch. 4, pp. 44-49, 1983.
Gerander, U., "Advances in Pattern Theory, The Rietz Lecture 1985", Division of Applied Mathematics, Brown University, pp. 1-45, 1985.
Hosmer, Jr., D. W. and Lemeshow, S., Applied Logistic Regression, A Wiley-Interscience Publication, John Wiley & Sons, p. 6, 1989.
Osborn, B., "The Identification and Estimation of Parameters in Patter Theoretical Models", IBM Technical Report (TR 00.3608), IBM Poughkeepsie, N.Y., pp. 1-25, Mar. 1991.
Pearse, R. W. B. and Gaydon, A. G., The Identification of Molecular Spectra, Fourth Edition, Imperial College, London, Chapman and Hall, pp. 217-219, 1976.
Striganov, A. R. and Sventitskii, N. S., Tables of Spectral Line of Neutral and Ionized Atoms, Atomic Spectroscopy Laboratory, I. V. Kurchatov Institute of Atomic Energy (Translated from Russian), IFI/Plenum, New York-Washington, pp. ix, x, 141-144 and 328, 1968.
Gifford, G. G., "Applications of Optical Emission Spectroscopy in Plasma Manufacturing Systems", SPIE vol. 1392 Advanced Techniques for INtegrated Circuit Processing, pp. 454-465, 1990.

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