Method and system for adjusting characteristics of...

Electricity: measuring and testing – Impedance – admittance or other quantities representative of... – Lumped type parameters

Reexamination Certificate

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C324S689000

Reexamination Certificate

active

07924028

ABSTRACT:
A method and system for adjusting characteristics of a relative humidity sensor in order to achieve a desired value of accuracy is presented. A relative humidity sensor charge balance circuit includes a series of sensing capacitors Cx1, Cx2including a thin porous platinum top plate, a humidity sensitive polyimide dielectric, and two metal bottom plates on a semiconductor substrate; and two fixed oxide capacitances Cref, and C0. Changes in humidity affect the humidity sensitive dielectric thereby causing changes in the sensing capacitive value of the capacitive circuit. The charge in the sensing capacitor and the fixed capacitor C0can be controlled separately by adjusting and/or trimming the supply voltage using a voltage trimmer; thereby the slope and offset of the relative humidity sensor circuit can be modified and controlled to particular desired values.

REFERENCES:
patent: 4831325 (1989-05-01), Watson, Jr.
patent: 6230543 (2001-05-01), Froehling et al.
patent: 6724612 (2004-04-01), Davis et al.
patent: 6867602 (2005-03-01), Davis et al.
Written Opinion and International Search Report from corresponding PCT Application Serial No. PCT/US2009/034824, mailed Jun. 29, 2009, 7 pages.

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