Photocopying – Projection printing and copying cameras – Methods
Reexamination Certificate
2007-02-06
2007-02-06
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Methods
C355S072000, C355S075000
Reexamination Certificate
active
10986077
ABSTRACT:
A method and apparatus for maintaining an optical gap between optical structures in a photolithography system is described. A frame defines first and second opposing surfaces. The first opposing surface defines a first opening and the second opposing surface defines a second opening. A plurality of spacing members are spaced apart on the first opposing surface around the first opening. The spacing members have substantially co-planar surfaces configured to mate with a surface of a first optical structure. A bonding agent seals a space around the first opening between the first opposing surface and the first optical structure. The frame thereby encloses the optical gap between the first optical structure and a second optical structure.
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Ivaldi Jorge
Laganza Joseph
ASML Holding N.V.
Nguyen Henry Hung
Sterne Kessler Goldstein & Fox P.L.L.C.
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