Method and structure for sample preparation for scanning...

Details Method and structure for sample preparation for scanning... Method and structure for sample preparation for scanning...

2011-08-02

2011-08-02

Sarkar, Asok K (Department: 2891)

Semiconductor device manufacturing: process

With measuring or testing

C356S243100, C356S243400, C257SE23179

Reexamination Certificate

active

07989228

ABSTRACT:
A method for using a calibration standard. The method includes providing a calibration standard. In a specific embodiment, the calibration standard has a substrate, a thickness of material having an edge region; and a conformal material of uniform thickness disposed on the edge region. The standard also has an upper surface pattern having the uniform thickness provided on the edge region. The method also includes using the upper surface pattern for a calibration process on a scanning electron microscope process.

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Office Action of Chinese Application No. 200510110573.0, dated Nov. 16, 2007 7 pages total (English translation not included).

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