Method and structure for passivating a PN junction

Coating processes – Electrical product produced – Integrated circuit – printed circuit – or circuit board

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357 52, 427 86, 427 87, 427 95, H01L 21314

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044735979

ABSTRACT:
A technique for passivating a PN junction adjacent a surface of a semiconductor substrate comprises coating the area of the surface adjacent the PN junction with a layer of hydrogenated amorphous silicon containing between about 5 and about 50 atomic percent of hydrogen.

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Chittick et al., "The Preparation and Properties of Amorphous Silicon" Journal Electrochemical Society: Solid State Science, vol. 116, No. 1, Jan. 1969, pp. 77-81.
Photoluminescence of Hydrogenated Amorphous Silicon, Applied Physics Letters, vol. 31, No. 7, Oct. 1, 1977, pp. 450-451.

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