Method and storage medium for replacing process instrument...

Details Method and storage medium for replacing process instrument... Method and storage medium for replacing process instrument...

2010-09-10

2011-10-25

Cadugan, Erica E (Department: 3726)

Tool changing

Process

C483S002000, C483S003000, C483S004000, C483S012000, C118S697000, C118S707000, C118S066000, C156S345310, C156S345320, C414S935000, C427S240000

Reexamination Certificate

active

08043200

ABSTRACT:
Disclosed is a method for replacing a process instrument in a processing apparatus, in which a target object is loaded by transfer mechanism into a processing unit and is subjected to a process by use of the process instrument. The method includes confirming that a process on the target object is finished in a processing unit designated as a process instrument replacement target, and providing information that a process instrument replacing operation is permitted to start. The method further includes, when a shutter of the processing unit designated as the process instrument replacement target is closed to perform a process instrument replacing operation and an operation prohibition state is thereby applied to the transfer mechanism, canceling the operation prohibition state to allow the transfer mechanism to perform a load/unload operation relative to a processing unit not designated as a process instrument replacement target.

REFERENCES:
patent: 6150627 (2000-11-01), Sugiyama
patent: 6456364 (2002-09-01), Imai
patent: 6821073 (2004-11-01), Koguchi
patent: 7292909 (2007-11-01), Inada et al.
patent: 7815558 (2010-10-01), Tajiri et al.
patent: 2001/0041651 (2001-11-01), Abe et al.
patent: 2005/0130453 (2005-06-01), Inada et al.
patent: 2005/0279281 (2005-12-01), Yamashita et al.
patent: 2008/0032502 (2008-02-01), Baskin et al.
patent: 2006-012912 (2006-01-01), None

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