Method and program for leveling aspherical workpieces

Data processing: measuring – calibrating – or testing – Measurement system – Orientation or position

Reexamination Certificate

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Reexamination Certificate

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11368753

ABSTRACT:
The invention provides an aspherical workpiece leveling method for leveling an aspherical workpiece mounted on a tilt correction table. The method includes three-dimensionally measuring a surface of the aspherical workpiece containing an extreme value; deriving a secondary curved surface from the obtained three-dimensionally measured values to obtain an extreme value of the secondary curved surface as a temporary extreme value; obtaining three-dimensionally measured values at three or more points from the surround about the obtained temporary extreme value; obtaining a plane defined by the obtained three-dimensionally measured values at three or more points; and adjusting the tilt correction table for leveling the obtained plane.

REFERENCES:
patent: 5253429 (1993-10-01), Konno et al.
patent: 6745616 (2004-06-01), Katayama et al.
patent: 11-211426 (1999-08-01), None
patent: 2000-266534 (2000-09-01), None

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