Method and product for fabricating a resonant-bridge microaccele

Details Method and product for fabricating a resonant-bridge microaccele Method and product for fabricating a resonant-bridge microaccele

1988-12-27

1990-01-16

Powell, William A.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

156628, 156647, 156650, 156657, 1566591, 156662, H01L 21306, B44C 122, C03C 1500, C03C 2506

Patent

active

048935093

ABSTRACT:
A resonant bridge microaccelerometer is formed using patterned Silicon-on-Insulator (SOI) material. A buried layer is formed in the silicon substrate using preferably oxygen ion implanting techniques. A predetermined proof mass is subsequently formed by selective deposition of an appropriate material on an epitaxially grown layer of silicon generally over the buried layer. The buried layer is subsequently removed by a hydrofluoric acid etch, thereby forming a gap generally everywhere therebetween the proof mass and the supporting silicon substrate, and delineating the resonant microbridges within the microaccelerometer.

REFERENCES:
patent: 4732647 (1988-03-01), Aine
patent: 4783237 (1988-11-01), Aine et al.
Albert, William C., "Vibrating Quartz Crystal Beam Accelerometer," pp. 33-44.
Howe, Roger T. et al., "Integrated Resonant-Microbridge Vapor Sensor," IEEE Transactions on Electron Devices, vol. ED-33, no. 4, Apr. 1986, pp. 499-506.
Schmidt, Martin A. et al., "Silicon Resonant Microsensors," Ceramic Engineering and Science Proceedings, Automotive Materials Conference, Nov. 19, 1986, pp. 1019-1034.

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