Method and measuring device for measuring an absolute distance

Details Method and measuring device for measuring an absolute distance Method and measuring device for measuring an absolute distance

2005-09-29

2009-10-27

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S004100

Reexamination Certificate

active

07609387

ABSTRACT:
In a method and a measuring device (10) for measuring an absolute distance value corresponding with a range (9) between a measuring device (10) and a target (8), wherein for measuring the absolute distance value a number of individual measuring steps are performed with an absolute distance meter (1), a distance variation between the measuring device (10) and the target (8) is also measured with a relative distance meter (2) at least approximately simultaneously with these individual measuring steps and the distance variation is taken into account as the absolute distance is being determined. Preferably an iterative method comprising several sampling steps is used for measuring the absolute distance, e.g. according to the Fizeau method, wherein an output value (A) is generated from an input value (fn, fn+1, fn+2, . . . ) and measured in each sampling step. The output value (A) is dependent on the input value (fn, fn+1, fn+2, . . . ) and on the distance.

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Yokoyama, Shuko, et al.; “Real-time and high-resolution absolute-distance measurement using a two-wavelength superheterodyne interferometer”; Measurement Science & Technology; IOP Publishing UK; vol. 10, No. 12, Dec. 1999; pp. 1233-1239; XP-002357464.

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