Method and means for vacuum gauging

Details Method and means for vacuum gauging Method and means for vacuum gauging

1979-11-19

1982-02-02

Tokar, Michael J.

Electricity: measuring and testing

Using ionization effects

For monitoring pressure

324462, G01N 2700

Patent

active

043142052

ABSTRACT:
The operating range of an ionization tube vacuum gauge is increased by applying at least two different bias voltages to the tube and measuring ion current for the two bias voltages. The ratio of the ion currents indicates vacuum pressure in the range of 10.sup.-1 to above 2 Torr. An ionization tube vacuum gauge provides a pressure read-out by the linear ion current response of an ionization tube between 10.sup.-10 Torr and 10.sup.-2 Torr. The non-linearity of the ion current response between 10.sup.-2 Torr and 10.sup.-1 Torr is compensated by a non-linear amplifier. Above 10.sup.-1 Torr the ratio of ion currents is utilized for determining pressure.

REFERENCES:
patent: 3253183 (1966-05-01), Van Oostrom
patent: 3394286 (1968-07-01), Brook
patent: 3399341 (1968-08-01), Banas et al.
patent: 3495165 (1970-02-01), Cobine et al.
E. W. Blauth, "An Ionization Gauge for the Pressure Range 10.sup.-5 to 10 Tor, Inst. fur Plasmaphgaik, GmbH, Garching-Munich, Oct. 28, 1969, 29 Bd, Heft 1, 1970, pp. 70-73.

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