Method and means for optical detection of charge density modulat

Details Method and means for optical detection of charge density modulat Method and means for optical detection of charge density modulat

1986-03-04

1988-07-19

LaRoche, Eugene R.

Optics: measuring and testing

By polarized light examination

356365, 356367, 356433, 324158D, 324158R, 324 73R, G01J 400, G01N 2100, G01R 1512

Patent

active

047580925

ABSTRACT:
Disclosed is a technique for probing dynamic sheet charge density variations in integrated semiconductor devices. Using a specially designed non-invasive Nomarski phase contrast interferometer a sheet charge density sensitivity of 2.6.times.10.sup.8 e/cm.sup.2 / .sqroot.Hz is extracted from experimental data for 1 mA of detected photocurrent. The charge density sensitivity makes possible .mu.V signal level detection in an active device, and with digital signals the corresponding signal
oise level is sufficiently high that multi-mega-baud data can be captured in real time.

REFERENCES:
patent: 4144503 (1979-03-01), Itoh et al.
patent: 4273421 (1981-06-01), Gurtler
patent: 4480916 (1984-11-01), Bareket et al.
patent: 4503541 (1985-03-01), Weller et al.
patent: 4583226 (1986-04-01), Liou
patent: 4661770 (1987-04-01), von Roos

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