Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent
1982-05-03
1985-02-12
Willis, Davis L.
Optics: measuring and testing
By dispersed light spectroscopy
Utilizing a spectrometer
356359, G01B 902
Patent
active
044987714
ABSTRACT:
For the point-by-point interferometric measuring of surfaces which are scanned along lines, or which are subjected to a processing procedure (e.g. etching) a focused laser beam is directed with oblique incidence as a measuring beam onto the respective measured points. The respective height of a measured point determines the path difference (phase difference) between the measuring beam and a reference beam which has been suitably split off the input beam. The oblique incidence (angle of incidence .gtorsim.80.degree.) makes it possible to measure interferometrically very rough surfaces. The measuring range may be extended if the reference beam is directed at an oblique angle of incidence, differing only slightly from that of the measuring beam onto the surface to be examined.
REFERENCES:
patent: 3623813 (1971-11-01), Hacman
patent: 3849003 (1974-11-01), Velzel
patent: 3958884 (1976-05-01), Smith
patent: 4298283 (1981-11-01), Makosch et al.
patent: 4358201 (1982-11-01), Makosch
Sawatari, "Surface Flaw Detection Using Oblique Angle Illumination", Applied Optics, vol. 11, No. 6, pp. 1337-1344, Jun. 1972.
Makosch Gunter
Schedewie Franz
International Business Machines - Corporation
Kallman N. N.
Koren Matthew W.
Schmid, Jr. Otto
Willis Davis L.
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