Method and means for controlling movement of a chuck in a test a

Details Method and means for controlling movement of a chuck in a test a Method and means for controlling movement of a chuck in a test a

1994-07-05

1996-08-27

Karlsen, Ernest F.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324756, G01R 3102

Patent

active

055504809

ABSTRACT:
A sense circuit (23) for generating an actuating signal and a method of using the actuating signal to control movement of a wafer chuck (12). The sense circuit (23) has sense input terminals (24, 28) coupled to corresponding probe-card probes (19, 18). A wafer (26) having contact pads (42, 42') is mounted on the wafer chuck (12) and moved towards the probe-card probes (18, 19). When the probe-card probes (18, 19) contact corresponding contact pads (42', 42) on the wafer, the sense circuit (23) generates an actuating signal. The actuating signal, which is generated in accordance with the heights of the contact pads (42', 42), enables control circuit (48) of the prober (11). The control circuit limits the movement of the wafer chuck (12) to prevent damage to the probe card (12) or the wafer (26).

REFERENCES:
patent: 3975680 (1976-08-01), Webb
patent: 4038599 (1977-07-01), Bove et al.
patent: 4328553 (1982-05-01), Fredriksen et al.
patent: 4583042 (1986-04-01), Riemer
patent: 4607525 (1986-08-01), Turner et al.
patent: 4780836 (1988-10-01), Miyazaki et al.
patent: 4929893 (1990-05-01), Sato et al.
patent: 5019771 (1991-05-01), Yang et al.
patent: 5065092 (1991-11-01), Sigler
patent: 5091692 (1992-02-01), Ohno et al.
patent: 5315237 (1994-05-01), Iwakura et al.

Affiliated with

Also associated with

Rating

Method and means for controlling movement of a chuck in a test a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and means for controlling movement of a chuck in a test a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and means for controlling movement of a chuck in a test a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1058368