Method and materials, including polybenzoxazole, for fabricating

Details Method and materials, including polybenzoxazole, for fabricating Method and materials, including polybenzoxazole, for fabricating

1997-11-17

1998-10-13

Kunemund, Robert

Etching a substrate: processes

Forming or treating thermal ink jet article

216 2, 216 33, 347 45, B41J 201, B41J 205, B41J 221, B41J 234

Patent

active

058207716

ABSTRACT:
An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer is placed over the main surface of a silicon chip, the sacrificial layer being patterned in the form of the void formed by the desired ink channels. A permanent layer, comprising a polybenzoxazole, is applied over the sacrificial layer. After polishing the two layers to form a uniform surface, the sacrificial layer is removed.

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Two articles, both entitled "Advanced Polybenzoxazoles For Low K and Positive Photopatternable Dielectrics," from the Eleventh International Conference on Photopolymers on Oct. 8, 1997.

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