Method and materials for fabricating an ink-jet printhead

Details Method and materials for fabricating an ink-jet printhead Method and materials for fabricating an ink-jet printhead

1996-09-12

1998-04-14

Loring, Susan A.

Etching a substrate: processes

Forming or treating thermal ink jet article

216 2, 216 33, 347 44, 347 45, B41J 204, B41J 201, B41J 221

Patent

active

057387990

ABSTRACT:
An ink-jet printhead fabrication technique enables capillary channels for liquid ink to be formed with square or rectangular cross-sections. A sacrificial layer is placed over the main surface of a silicon chip, the sacrificial layer being patterned in the form of the void formed by the desired ink channels. A permanent layer, comprising permanent material, is applied over the sacrificial layer, and, after polishing the two layers to form a uniform surface, the sacrificial layer is removed. Preferred materials for the sacrificial layer include polyimide while preferred materials for the permanent layer include polyarylene ether, although a variety of material combinations are possible.

REFERENCES:
patent: 4497684 (1985-02-01), Sebesta
patent: 4650545 (1987-03-01), Laakso et al.
patent: 5236572 (1993-08-01), Lam et al.
patent: 5296092 (1994-03-01), Kim
patent: 5322594 (1994-06-01), Bol
patent: 5378583 (1995-01-01), Guckel et al.
patent: 5401983 (1995-03-01), Jokerst et al.
patent: 5454904 (1995-10-01), Ghezzo et al.
patent: 5465009 (1995-11-01), Drabik et al.

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