Method and masking structure for configurating thin layers

Details Method and masking structure for configurating thin layers Method and masking structure for configurating thin layers

1975-04-01

1977-12-06

Weiffenbach, Cameron K.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

427 43, 428256, 428919, B32B 310

Patent

active

040618145

ABSTRACT:
A method for configurating thin layers, particularly in thin film circuits, wherein a layer to be configurated is irradiated with an electron beam passing through a mask to obtain a configuration corresponding to the configuration of selected portions of such a mask, and a mask for use therein, as well as a method of making such mask, in which the mask is so constructed that, in use, the electron beam completely radiates the geometric shadow areas of the supporting elements on the thin film.

REFERENCES:
patent: 2779269 (1957-01-01), Hill
patent: 3118050 (1964-01-01), Hetherington
patent: 3192136 (1965-06-01), Reid
patent: 3402110 (1968-09-01), Scherrer
patent: 3476658 (1969-11-01), Corwin
patent: 3878061 (1975-04-01), Feldstein

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