Method and mask for forming thin film

Coating processes – Electrical product produced – Piezoelectric properties

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Details

118505, 118721, 427282, 204298, C23C 1308, C23C 1500

Patent

active

047043067

ABSTRACT:
The invention relates to a mask for use in forming a thin film on a workpiece on which the thin film is to be formed, the mask comprising a member which flexes so that the center part of the mask projects toward the workpiece in the temperature range in which the thin film is formed.

REFERENCES:
patent: 1987167 (1935-01-01), Valverde
patent: 2003018 (1935-05-01), Spencer
patent: 2675267 (1954-04-01), Vaughan
patent: 3170810 (1965-02-01), Kagan

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