Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2007-07-25
2008-08-12
Pyo, Kevin (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559410, C250S559450, C356S237100, C356S237400
Reexamination Certificate
active
07411207
ABSTRACT:
An apparatus for inspecting particles and/or pattern defects of an object under inspection. Data processing means obtains information on size of the particles and/or the pattern defects from an intensity of the scattered light detected by the light detecting means by referring to a relationship between an intensity of scattered light from a standard particle and a size of the standard particle, and using a calibration coefficient for compensating for a change in intensity of the light of the illuminating means from a predetermined intensity.
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Hamamatsu Akira
Jingu Takahiro
Nishiyama Hidetoshi
Noguchi Minori
Ohshima Yoshimasa
Antonelli, Terry Stout & Kraus, LLP.
Hitachi , Ltd.
Hitachi High-Technologies Corporation
Pyo Kevin
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