Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2006-10-03
2006-10-03
Pyo, Kevin (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559410, C250S559420, C250S559450, C356S237100, C356S237500, C702S084000
Reexamination Certificate
active
07115892
ABSTRACT:
Conventionally, a particle/defect inspection apparatus outputs a total number of detected particles/defects as the result of detection. For taking countermeasures to failures in manufacturing processes, the particles/defects detected by the inspection apparatus are analyzed. Since the inspection apparatus outputs a large number of detected particles/defects, an immense time is required for analyzing the detected particles/defects, resulting in a delay in taking countermeasures to a failure in the manufacturing processes. In the present invention, an apparatus for optically inspecting particles or defects relates a particle or defect size to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.
REFERENCES:
patent: 2004/0254752 (2004-12-01), Wisniewski et al.
Hamamatsu Akira
Jingu Takahiro
Nishiyama Hidetoshi
Noguchi Minori
Ooshima Yoshimasa
Hitachi , Ltd.
Hitachi High - Technologies Corporation
Pyo Kevin
Townsend and Townsend / and Crew LLP
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