Radiant energy – Photocells; circuits and apparatus – With circuit for evaluating a web – strand – strip – or sheet
Reexamination Certificate
2005-08-30
2005-08-30
Pyo, Kevin (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
With circuit for evaluating a web, strand, strip, or sheet
C250S559040, C250S559450, C356S237100, C356S237400
Reexamination Certificate
active
06936835
ABSTRACT:
An apparatus for optically inspecting particles and/or defects correlates sizes of particles and/or defects to a cause of failure in an inspection result. A data processing circuit points out a cause of failure from the statistics on the inspection result, and displays information on the inspection result. A failure analysis is conducted by setting a threshold for identifying a failure in each of regions on a semiconductor device or the like to statistically evaluate detected particles.
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Hall et al., “YIeld Monitoring and Analysis in Semiconductor Manufacturing,” VLSI Technology Seminar,Semicon Kansai, pp. 4-42 through 4-47, 1997.
U.S. Appl. No. 09/931,997, filed Aug. 17, 2001.
Hamamatsu Akira
Jingu Takahiro
Nishiyama Hidetoshi
Noguchi Minori
Ohshima Yoshimasa
Antonelli Terry Stout & Kraus LLP
Hitachi , Ltd.
Hitachi High-Tech Electronics Engineering Co., Ltd.
Pyo Kevin
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