Method and interferometer for the measurement of short distances

Details Method and interferometer for the measurement of short distances Method and interferometer for the measurement of short distances

1983-08-31

1987-03-03

Willis, Davis L.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 1102

Patent

active

046472053

ABSTRACT:
A method and apparatus for the measurement of short distances by means of an interferometer using incoherent light is described. An incoherent beam of light is transmitted via a beam-splitter (2) both to the reference point (3) and to the object (4) to be measured, and the position of the reference device is adjusted until interference is detected, at which time the distances passed by the beams are equal. The position of the reference device (3) is adjusted periodically by means of an automatic actuating device, which may be, e.g., a mirror attached to a loudspeaker mechanism, and the interference is detected by means of an electronic detector (5), as well as, at the moment of interference, the position of the actuating device is read, e.g., on the basis of the momentary value of the supply signal controlling the actuating device. By regularly monitoring the timing of the repeated interference moments in relation to the movement of the actuating device, it is possible, after calibration of the apparatus, to observe the changes in the position of the object (4) to be measured continuously.

REFERENCES:
patent: 3319515 (1967-05-01), Flournoy
patent: 3563663 (1971-02-01), Barringer
Flournoy et al., "White Light Interferometric Thickness Gauge", Applied Optics, vol. 11, No. 9, Sep. 1972, pp. 1907-1915.

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