Chemistry: fischer-tropsch processes; or purification or recover – Liquid phase fischer-tropsch reaction
Reexamination Certificate
2007-11-20
2007-11-20
Eyler, Yvonne (Department: 1621)
Chemistry: fischer-tropsch processes; or purification or recover
Liquid phase fischer-tropsch reaction
Reexamination Certificate
active
11277910
ABSTRACT:
A method and integrated system are provided for purifying and delivering a metal carbonyl precursor utilized to process a substrate. The method includes providing the metal carbonyl precursor containing un-reacted metal carbonyl precursor and metal-containing impurities in a metal precursor vaporization chamber containing a precursor collection plate, evacuating the metal precursor vaporization chamber, pressurizing the metal precursor vaporization chamber with a CO-containing gas, vaporizing the un-reacted metal carbonyl precursor, and condensing the vaporized un-reacted metal carbonyl precursor as a purified metal carbonyl precursor on the precursor collection plate. The method may further include vaporizing the purified metal carbonyl precursor, and delivering a process gas containing the vapor of the purified metal carbonyl precursor by flowing a gas containing CO through the metal precursor vaporization chamber to a deposition system configured to expose a substrate to the process gas.
REFERENCES:
patent: 4851895 (1989-07-01), Green et al.
patent: 5108983 (1992-04-01), Lackey, Jr. et al.
patent: 5171610 (1992-12-01), Liu
patent: 5312509 (1994-05-01), Eschbach
patent: 5553395 (1996-09-01), Wen et al.
patent: 5904771 (1999-05-01), Tasaki et al.
patent: 5914001 (1999-06-01), Hansen
patent: 6303809 (2001-10-01), Chi et al.
patent: 6319832 (2001-11-01), Uhlenbrock et al.
patent: 6428623 (2002-08-01), Westmoreland et al.
patent: 6440495 (2002-08-01), Wade et al.
patent: 6544345 (2003-04-01), Mayer et al.
patent: 6605735 (2003-08-01), Kawano et al.
patent: 6660328 (2003-12-01), Dahmen et al.
patent: 6701066 (2004-03-01), Sandhu
patent: 6713373 (2004-03-01), Omstead
patent: 6718126 (2004-04-01), Lei
patent: 6740586 (2004-05-01), Wang et al.
patent: 2003/0129306 (2003-07-01), Wade et al.
patent: 2004/0013577 (2004-01-01), Ganguli et al.
patent: 2004/0105934 (2004-06-01), Chang et al.
patent: 2004/0241321 (2004-12-01), Ganguli et al.
patent: 2005/0070100 (2005-03-01), Yamasaki et al.
patent: 2005/0081882 (2005-04-01), Greer et al.
patent: 2005/0110142 (2005-05-01), Lane et al.
patent: 2005/0186341 (2005-08-01), Hendrix et al.
patent: 0714999 (1996-06-01), None
patent: WO2004010463 (2004-01-01), None
C. Czekaj et al., Chemical Vapor Deposition of FeCox and FeCoxOy, Thin Films from Fe—Co Carbonyl Clusters, Inorg. Chem. 1988, 27, pp. 8-10.
Eyler Yvonne
Lao M Louisa
Tokyo Electron Limited
Wood Herron & Evans LLP
LandOfFree
Method and integrated system for purifying and delivering a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and integrated system for purifying and delivering a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and integrated system for purifying and delivering a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3881534