Method and geometry for reducing drift in electrostatically...

Optical: systems and elements – Optical modulator – Light wave temporal modulation

Reexamination Certificate

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C359S254000, C359S290000

Reexamination Certificate

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06888658

ABSTRACT:
A method and geometry for reducing drift in an electrostatically actuated device, the electrostatically actuated device including a dielectric material, for insulating conducting sections from a ground, the conducting sections being used to generate an electric field for controlling thereby the electrostatically actuated device includes, configuring a geometry of the dielectric material such that the electric field applied to exposed dielectric material comprises a substantially homogeneous electric field.

REFERENCES:
patent: 6130627 (2000-10-01), Tyburski et al.
patent: 6243194 (2001-06-01), Brazas et al.
patent: 6326625 (2001-12-01), Zur
patent: 6624084 (2003-09-01), Maeda et al.

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