Method and device utilizing plasma source for real-time gas...

Details Method and device utilizing plasma source for real-time gas... Method and device utilizing plasma source for real-time gas...

2007-04-10

2007-04-10

Evans, F. L. (Department: 2877)

Optics: measuring and testing

By dispersed light spectroscopy

With sample excitation

C356S072000, C359S507000

Reexamination Certificate

active

11391186

ABSTRACT:
Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.

REFERENCES:
patent: 4857136 (1989-08-01), Zajac
patent: 5290383 (1994-03-01), Koshimizu
patent: 5986747 (1999-11-01), Moran
patent: 6366346 (2002-04-01), Nowak et al.
patent: 6643014 (2003-11-01), Chevalier et al.

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