Method and device utilizing plasma source for real-time gas...

Optics: measuring and testing – By dispersed light spectroscopy – With sample excitation

Reexamination Certificate

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C438S016000

Reexamination Certificate

active

07019829

ABSTRACT:
Aspects of the present invention provide novel methods and devices for sampling gas, exciting the sampled gas to emit radiation and detecting in real time from the emitted radiation a plurality of wave bands of an emission spectrum. Energy used to excite the sampled gas may be adjusted based on the detected wave bands. A process may be controlled in real time based on the detected wave bands. Novel interfaces may be used to display portions of the detected wave bands. A known flow of a reference gas may be included in the flow of sampled gases and an unknown flow of an unknown flow gas determined.

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