Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
Patent
1983-03-31
1984-08-14
Demers, Arthur P.
Chemistry: electrical and wave energy
Processes and products
Vacuum arc discharge coating
204192SP, 204192F, 428216, 428469, C23C 1500
Patent
active
044655770
ABSTRACT:
The subject invention involves the provision of a cermet for providing relatively high resistivity in a relatively small space. The cermet includes a substrate and multiple, ultra-thin, alternating layers of conductive and nonconductive materials on the substrate. Each ultra-thin layer is formed by radio-frequency sputtering to produce layers of discontinuous islands of particles of each of the above materials. The invention also relates to a method of producing such cermets by radio-frequency sputtering.
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Demers Arthur P.
Gould Inc.
Pierce K. H.
Sachs Edward E.
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