Image analysis – Applications – Manufacturing or product inspection
Patent
1998-01-23
2000-06-06
Au, Amelia
Image analysis
Applications
Manufacturing or product inspection
348125, 382141, G06K 900
Patent
active
06072899&
ABSTRACT:
A three-dimensional shaped defect inspecting method including a three-dimensional shape detection region selecting step for detecting a two-dimensional picture signal by taking a two-dimensional optical picture fluorescence emitted from a detection object and selecting a three-dimensional shape detection region in respect of the detection object based on the detected two-dimensional picture signal, and a three-dimensional shape determining step for detecting a picture signal by taking an optical picture in accordance with a height by reflected light from the detection object and sampling height information with a desired two-dimensional pixel size in respect of the selected three-dimensional shape inspection region with respect to the detected picture signal, thereby calculating and determining a three-dimensional shape, whereby a defect caused by a deficiency in thickness or the like on a wiring pattern of a solid shape, formed on a detection object of a circuit board or the like, can be detected in a short period of time, and its device.
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Doi Hideaki
Irie Yoko
Koshishiba Hiroya
Nomoto Mineo
Au Amelia
Bali Vikkram
Hitachi , Ltd.
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