Method and device for treating and/or coating a surface of...

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C427S248100, C427S255230

Reexamination Certificate

active

06875468

ABSTRACT:
Method for treating and/or coating a surface of an object, especially for coating a surface of a substrate such as a semiconductor component or solar cell, in which the surface is supplied with a gas that contains particles that will interact and/or react with the surface, forming a coating thereon. The surface of the object is oriented at an angle α from the vertical, and the gas is directed toward the surface such that it flows along the object by force of convection, starting from the base area of the surface of the object.

REFERENCES:
patent: 4352713 (1982-10-01), Morita
patent: 4597986 (1986-07-01), Scapple et al.
patent: 4999215 (1991-03-01), Akagi et al.
patent: 6265353 (2001-07-01), Kinder et al.
Chemical Vapor Deposition for Microelectronics, Arthur Sherman, Noyes Publications, USA pp. 31-39 and 150-174.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method and device for treating and/or coating a surface of... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and device for treating and/or coating a surface of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for treating and/or coating a surface of... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3392412

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.