Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate
2005-04-05
2005-04-05
Meeks, Timothy (Department: 1762)
Coating processes
Coating by vapor, gas, or smoke
Mixture of vapors or gases utilized
C427S248100, C427S255230
Reexamination Certificate
active
06875468
ABSTRACT:
Method for treating and/or coating a surface of an object, especially for coating a surface of a substrate such as a semiconductor component or solar cell, in which the surface is supplied with a gas that contains particles that will interact and/or react with the surface, forming a coating thereon. The surface of the object is oriented at an angle α from the vertical, and the gas is directed toward the surface such that it flows along the object by force of convection, starting from the base area of the surface of the object.
REFERENCES:
patent: 4352713 (1982-10-01), Morita
patent: 4597986 (1986-07-01), Scapple et al.
patent: 4999215 (1991-03-01), Akagi et al.
patent: 6265353 (2001-07-01), Kinder et al.
Chemical Vapor Deposition for Microelectronics, Arthur Sherman, Noyes Publications, USA pp. 31-39 and 150-174.
Campe Hilmar Von
Kunz Thomas
Fuller Eric B.
Meeks Timothy
RWE Solar GmbH
LandOfFree
Method and device for treating and/or coating a surface of... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and device for treating and/or coating a surface of..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for treating and/or coating a surface of... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3392412