Method and device for the thermal treatment of substrates

Details Method and device for the thermal treatment of substrates Method and device for the thermal treatment of substrates

2005-11-12

2010-11-30

Paik, Sang Y (Department: 3742)

Electric heating

Heating devices

Combined with container, enclosure, or support for material...

C219S444100, C392S416000, C118S724000

Reexamination Certificate

active

07842905

ABSTRACT:
This invention relates to a method and a device for the thermal treatment of substrates in which the substrates are held in contact with or a small distance away from a heating plate, which is heated by a plurality of separately controllable heating elements on the side of the heating plate facing away from the substrate, the heating plate being surrounded, at least in its plane, by a frame spaced apart therefrom, and gas being conveyed, in a controlled manner, through a gap between the frame and at least one edge of the heating plate.

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patent: 2003/0032302 (2003-02-01), Nishi et al.
patent: 2004/0005507 (2004-01-01), Lakkapragada et al.

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