Method and device for the regulation of a magnetic deflection sy

Details Method and device for the regulation of a magnetic deflection sy Method and device for the regulation of a magnetic deflection sy

1980-09-04

1983-04-19

Smith, Alfred E.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250397, H01J 320

Patent

active

043807038

ABSTRACT:
In an exemplary embodiment, a command value signal is supplied to a magnetic deflection control loop which operates based on measurement of deflection coil current. A signal proportional to the rate of change of deflection magnetic field is supplied to one input of a differential amplifier, and a signal in accordance with the rate of change of the command value signal is connected with a second input of the differential amplifier. Any error between the rate of change signals as sensed by the differential amplifier is used as an auxiliary control of the deflection magnetic field, whereby eddy current influences are overcome. The system is particularly useful for precision control of an electron beam writer in the manufacture of semiconductor integrated circuits.

REFERENCES:
patent: 3090889 (1963-05-01), Levinson
patent: 3970894 (1976-07-01), Yasuda et al.
patent: 4125772 (1978-11-01), Holmes

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