Method and device for the projection printing of a mask onto a s

Details Method and device for the projection printing of a mask onto a s Method and device for the projection printing of a mask onto a s

1979-05-24

1980-08-05

Griffin, Donald A.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 77, G03B 2732, G03B 2754

Patent

active

042159350

ABSTRACT:
A method and device for the projection printing of a mask onto a workpiece, particularly onto a semiconductor substrate, said mask being illuminated by means of a light source and imaged on said workpiece by means of a projection lens, said workpiece being coated with a photoresist.

REFERENCES:
patent: 3334543 (1967-08-01), Perner et al.
patent: 3573456 (1971-04-01), Beeh
patent: 3729257 (1973-04-01), Gunto et al.
patent: 4083634 (1978-04-01), Momose et al.

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