Method and device for the production of optical lenses or the li

Electric heating – Metal heating – By arc

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2191212, 21912117, 21921235, 359900, B23K 1500, B23K 1508

Patent

active

055043020

ABSTRACT:
A method for the production of optically operating structures, particularly of lenses and lens arrays and prisms, with which in at least one masking step (MS) a base structure (10) that is optically operating in steps is formed on the surface of a substrate (1) in at least one masking step (MS) with a subsequent etching step (AS) and is then smoothed by capillary surface forces of the melted substrate in a melting step by means of heating to melting, characterized in that in the melting step (SS) the substrate (1) that carries the base structure (10) is placed inside a vacuum chamber (3), and then to charge the base structure (10) in a strip-like manner with a high-voltage-accelerated electron beam (4), which simultaneously moves on the substrate (1) perpendicularly and in respect to a melting zone (11) operated by the electron beam (4) on the base structure (10), with such an energy density that the melting zone (11) has a depth (T) that corresponds to at least one step height (H) of the stepped base structure (10). A device for executing the method and novel products produced by the method are disclosed.

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Y. A. Carts, "Micro-optics has macro potential", Laser Focus World, vol. 27, No. 6, 1991.
D. Daly et al., "The manufacture of microlenses by melting photoresist", Measurement Science and Technology, vol. 1, No. 8, 1990, pp. 759-766.
V. W. B. Velclkamp et al., "Binare Optik", Spektrum der Wissenschart, Jul. 1992, pp. 44-50.

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