Method and device for the generation of far ultraviolet or...

Details Method and device for the generation of far ultraviolet or... Method and device for the generation of far ultraviolet or...

2005-11-22

2005-11-22

Berman, Jack I. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C378S119000, C315S111210

Reexamination Certificate

active

06967341

ABSTRACT:
In a method for generating extreme ultraviolet radiation or soft x-ray radiation by means of gas discharge, in particular, for EUV lithography, a discharge vessel is provided with two electrodes that are connected to high voltage. Between the electrodes, in an area of two electrode recesses that are coaxial to one another, a gas fill with predetermined gas pressure in accordance with a discharge operation realized on the left branch of the Paschen curve is provided. In this area, a plasma emitting the radiation is generated when supplying energy. The plasma is displaced or deformed by a pressure change of the gas fill in the area of the electrode recesses.

REFERENCES:
patent: 4596030 (1986-06-01), Herziger et al.
patent: 5023897 (1991-06-01), Neff et al.
patent: 6300720 (2001-10-01), Birx

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