Method and device for testing optical imaging systems

Details Method and device for testing optical imaging systems Method and device for testing optical imaging systems

1981-05-22

1984-02-07

Rosenberger, R. A.

Optics: measuring and testing

Lens or reflective image former testing

For optical transfer function

356345, G01M 1100, G01B 902, G01B 1114, H01L 2166

Patent

active

044299923

ABSTRACT:
Optical imaging systems are used for making microstructures, and have to be very precise. In order to test these imaging systems, a new method, and a device for carrying out this method, are described in which two interferograms are made and compared. In a first step, an interferogram of an original pattern is made, followed by a second step in which an interferogram of a copy of the original pattern is produced using the identical conditions used to form the first interferogram. The pattern copy is made in the imaging system to be tested. In a third step, the two interferograms are compared with one another to provide a measure of the accuracy of the imaging system. This technique can be used for testing imaging systems which produce only a mirror image.

REFERENCES:
patent: 3726595 (1973-10-01), Matsumoto
patent: 3891321 (1975-06-01), Hock
patent: 3967903 (1976-07-01), Enami et al.
patent: 4159522 (1979-06-01), Zanoni
patent: 4218142 (1980-08-01), Kryger et al.
patent: 4221487 (1980-09-01), Lacombat et al.
patent: 4299482 (1981-11-01), Task
Jarrell et al. "Some New Advances in Grating Ruling, Replication and Testing", Applied Optics, vol. 3, No. 11 (Nov. 1964) pp. 1251-1262.

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