Optics: measuring and testing – For light transmission or absorption
Patent
1998-05-28
2000-05-30
Font, Frank G.
Optics: measuring and testing
For light transmission or absorption
356381, 73801, G01N 2100, G01N 2904
Patent
active
060697032
ABSTRACT:
An apparatus for measuring a property of a structure comprising at least one layer, the appratus including a light source that produces an optical pulse having a duration of less than 10 ps; a diffractive element that receives the optical pulse and diffracts it to generate at least two excitation pulses; an optical system that spatially and temporally overlaps at least two excitation pulses on or in the structure to form an excitation pattern, containing at least two light regions, that launches an acoustic wave having an out-of-plane component that propagates through the layer, reflects off a lower boundary of the layer, and returns to a surface of the structure to modulate a property of the structure; a light source that produces a probe pulse that diffracts off the modulated property to generate at least one signal pulse; a detector that receives at least one signal pulse and in response generates a light-induced electrical signal; and an analyzer that analyzes the light-induced electrical signal to measure the property of the structure.
REFERENCES:
patent: 3462223 (1969-08-01), Tiemann et al.
patent: 4522510 (1985-06-01), Rosencwaig et al.
patent: 4655547 (1987-04-01), Heritage et al.
patent: 4710030 (1987-12-01), Tauc et al.
patent: 4728165 (1988-03-01), Powell
patent: 4812036 (1989-03-01), Inoue
patent: 4939368 (1990-07-01), Brown
patent: 5062693 (1991-11-01), Beratan et al.
patent: 5132824 (1992-07-01), Patel et al.
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5263039 (1993-11-01), Skupsky et al.
patent: 5285438 (1994-02-01), Marchand et al.
patent: 5344236 (1994-09-01), Fishman
patent: 5361638 (1994-11-01), Pettersson et al.
patent: 5438879 (1995-08-01), Reda
patent: 5479256 (1995-12-01), Tamai et al.
patent: 5546811 (1996-08-01), Rogers et al.
patent: 5633711 (1997-05-01), Nelson et al.
patent: 5672830 (1997-09-01), Rogers et al.
patent: 5734470 (1998-03-01), Rogers et al.
patent: 5748318 (1998-05-01), Maris et al.
International Search Report.
Allen et al., "Microfabricated Structures for the in situ Measurement of Residual Stress, Young's Modulus, and Ultimate Strain of Thin Films", Appl. Phys. Lett., 51:241-243, 1987.
Bauer et al., "Determination of the Stresses and Properties of Polymer Coatings", J. of Coatings Technology, 60:51-55, 1988.
Coburn et al., "Stress in Polyimide Coatings", J. of Polymer Science: Part B: Polymer Physics, 32:1271-1283, 1994.
Duggal et al., "Resolution of Conflicting Descriptions of Propylene Glycol Relaxation Dynamics Through Impulsive Stimulated Scattering Experiments", Polymer Communications, 32:356-360, 1991.
Duggal et al., "Real-Time Optical Characterization of Surface Acoustic Modes of Polymide Thin-Film Coatings", J. Appl. Phys. 72:2823-2839, 1992.
Fishman et al., "Surface Selectivity in Holographic Transient Grating-Diffraction", Stanford University, Stanford, CA; W.W. Hansen Exp. Phys. Lab. & Dept. of Chemistry.
Goldsmith et al., "Measurement of Stresses Generated to Cured Polyimide Films", J. Vac. Sci. Technol. 1:407-409, 1983.
Head et al., "Determination of Shear Stress at a Solder Paste/Stencil Interface", Mat. Res. Soc. Symp. Proc. 323:425-433, 1994.
Maden et al., "Stress Analysis of Thin Polyimide Films Using Holographic Interferometry", Experimental Mechanics 31:179-184, 1991.
Rogers et al., "Study of Lamb Acoustic Waveguide Modes in Unsupported Polyimide Thin Films Using Real-Time Impulsive Stimulated Thermal Scattering", J. Appl. Phys. 75:1534-1556, 1994.
Rogers et al., "Real-Time In Situ Characterization of Thin Films", CHEMF. 8, 27 (1992), pp. 4-8.
Duggal, "Picosecond-Microsecond Structural Relaxation Dynamics in Polypropelyne Glycol", Journal of Chemical Physics, No. 94, pp. 7677-7688, Jun. 15, 1991.
Whitman et al., Appl. Optics, 8, 1567 (1969).
Nizzoli et al., Dynamical Properties of Solids (ed. G.K. Horton et al., North-Holland Amsterdam, 1990) vol. 6, 283.
Bortolani et al., J. Phys. C., 16, 1757 (1983).
Fishman I.M. et al., "Surface Selectivity in Four-Wave Mixing: Transient Gratings as a Theoretical and Experimental Example", J. Opt. Soc. Am. B., vol. 8, No. 9, Sep. 1991, pp. 1880-1888.
Barish et al., "Photoinduced Ionization of Bovine Serum Albumin by Holographic Relaxation Methods", J. Chem. Phys. 85:4194-4195, 1986.
Burzynski et al., "Study of Anisotrophy of Acoustic Wave Propagation in Stretched poly(vinylidene difluoride) Film Using the Picosecond Transient Grating Technique", Polymer, 30:1247-1250, 1989.
Deeg et al., "New Grating Experiments in the Study of Irreversible Photochemical Reactions", IEEE J. Quantum Electronics, QE-22:1476-1481, 1986.
Espinet et al., "Laser-induced Gratings in Nematic/Cholesteric Mixtures", App. Phys. Letters, 50:1924-1926, 1987.
Meth et al., "Experimental and Theoretical Analysis of Transient Grating Generation and Detection of Acoustic Waveguide Modes in Ultrathin Solids", J. App. Phys. 67:3362-3377, 1990.
Greene et al., Picosecond Relaxation Dynamics in Polydiacetylene-pTs, Chem. Phys. Letters, 139:381-385, 1987.
Meth et al., "Generation and Detection of Acoustic Waveguide Modes in Ultrathin Crystals Using the Transient Grating Technique", Chem. Phys. Letters, 162:306-312, 1989.
Nelson et al., "Optical Generation of Tunable Ultrasonic Waves", J. App. Phys., 53:1144-1149, 1982.
Nizzoli, "Problems with the Determination of Elastic Constants from Higher-Order Surface Waves: Results for Al on NaCl", Physical Review B, 37:1007-1010, 1988.
Noll et al., "Picosecond Photoinduced Index Changes in a Si:H and Related Alloys Measured by Transient Grating Experiments", J. Non-Crystalline Solids, 97 & 98:141-144, 1987.
Portella et al., "Four-Wave Mixing Experiments in Cresyl Violet Thin Films: Inadequacy of a Two-Level Interpretation", J. Phys. Chem., 91:3715-3719, 1987.
Prasad, "Non-Linear Optical Effects in Thin Organic Polymeric Films", Thin Solid Films, 152:275-294, 1987.
Rao et al., "Third Order Nonlinear Optical Interactions in Thin Films by Poly-p-phenylenebenzobisthiazole Polymer Investigated by Picosecond and Subpicosend Degenerate Four Wave Mixing", App. Phys. Letters, 48:1187-1189, 1986.
Rao et al., "Picosecond Transient Grating Studies of Polymeric Thin Films", App. Phys. Letters, 48:387-389, 1986.
Rose et al., Picosecond Transient Grating Transport in Anthracene Single Crystals, Measurements of Singlet Excitation, Chem. Phys. Letters, 106:13-19, 1984.
Rao et al., "Picosecond Laser-Induced Transient Grating Probe of the Mechanical Properties of High-Modulus Poly(p-phenylenebenzobisoxazole-2.6-diyl)", Macromolecules, 22:985-989, 1989.
Rothenhausler, "Plasmon Surface Polariton Fields for the Characterization of Thin Films", Thin Solid Films, 159:323-330, 1988.
A.R. Duggal et al., "Real-time Characterization of Acoustic Modes of Polyimide Thin-Film Coatings Using Impulsive Stimulated Thermal Scattering", App. Phys. Lett., 60(6) Feb. 10, 1992, pp. 692-694.
Banet Matthew J.
Crimmins Timothy F.
Fuchs Martin
Maznev Alexei
Nelson Keith A.
Active Impulse Systems Inc.
Font Frank G.
Piotrowski Tony E.
Smith Zandra
LandOfFree
Method and device for simultaneously measuring the thickness of does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and device for simultaneously measuring the thickness of , we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for simultaneously measuring the thickness of will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1914717