Method and device for separating ion mass, and ion doping...

Details Method and device for separating ion mass, and ion doping... Method and device for separating ion mass, and ion doping...

2005-05-31

2005-05-31

Lee, John P. (Department: 2881)

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

C250S299000, C250S300000

Reexamination Certificate

active

06900434

ABSTRACT:
A hollow exciting current pathway in the form of a conductor is arranged outside of an ion deflection casing with a curved contour and having an inlet and an outlet. The conductor is composed of a widthwise spiral formation of conductors running through the inlet and outlet and along the curved contour with a result that a magnetic field which is uniform widthwise is formed in the ion deflection casing. An ion beam is introduced through between the conductors at the inlet into the hollow exciting current pathway. By the action of the magnetic field through the hollow exciting current pathway, the ion beam is bent depending upon mass of ions. The ion beam with desired mass is taken out through between the conductors at the outlet with a result that an ion beam greater in size can be ion mass separated uniformly.

REFERENCES:
patent: 3842269 (1974-10-01), Liebl et al.
patent: 5043576 (1991-08-01), Broadhurst et al.
patent: 5350926 (1994-09-01), White et al.
patent: 5834786 (1998-11-01), White et al.
patent: 6160262 (2000-12-01), Aoki et al.
patent: 10-241590 (1998-09-01), None
patent: 10-283977 (1998-10-01), None

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