Method and device for protecting micro electromechanical...

Details Method and device for protecting micro electromechanical... Method and device for protecting micro electromechanical...

2005-09-20

2005-09-20

Tran, Minhloan (Department: 2826)

Semiconductor device manufacturing: process

Packaging or treatment of packaged semiconductor

Making plural separate devices

C438S118000, C438S458000, C257S620000

Reexamination Certificate

active

06946326

ABSTRACT:
A wafer cap protects micro electromechanical system (“MEMS”) structures during a dicing of a MEMS wafer to produce individual MEMS dies. A MEMS wafer is prepared having a plurality of MEMS structure sites thereon. Upon the MEMS wafer, the wafer cap is mounted to produce a laminated MEMS wafer. The wafer cap is recessed in areas corresponding to locations of the MEMS structure sites on the MEMS wafer. The capped MEMS wafer can be diced into a plurality of MEMS dies without causing damage to or contaminating the MEMS die.

REFERENCES:
patent: 4791075 (1988-12-01), Lin
patent: 4907065 (1990-03-01), Sahakian
patent: 5150196 (1992-09-01), Yamamoto et al.
patent: 5323051 (1994-06-01), Adams et al.
patent: 5362681 (1994-11-01), Roberts, Jr. et al.
patent: 5435876 (1995-07-01), Alfaro et al.
patent: 5610431 (1997-03-01), Martin
patent: 5824177 (1998-10-01), Yoshihara et al.
patent: 5831162 (1998-11-01), Sparks et al.
patent: 6106735 (2000-08-01), Kurle et al.
patent: 6109113 (2000-08-01), Chavan et al.
patent: 6210514 (2001-04-01), Cheung et al.
patent: 6410360 (2002-06-01), Steenberge
patent: 6429506 (2002-08-01), Fujii et al.
patent: 6465329 (2002-10-01), Glenn
patent: 6555417 (2003-04-01), Spooner et al.
patent: 199 11 916 (1999-09-01), None
patent: 100 13 067 (2000-09-01), None
patent: 08250454 (1996-09-01), None

Affiliated with

Also associated with

Rating

Method and device for protecting micro electromechanical... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and device for protecting micro electromechanical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and device for protecting micro electromechanical... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3404530