Method and device for protecting interferometric modulators...

Details Method and device for protecting interferometric modulators... Method and device for protecting interferometric modulators...

2008-07-29

2008-07-29

Sugarman, Scott J. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S196100, C359S237000

Reexamination Certificate

active

11119651

ABSTRACT:
A MEMS device such as an interferometric modulator includes an integrated ESD protection element capable of shunting to ground an excess current carried by an electrical conductor in the MEMS device. The protection element may be a diode and may be formed by depositing a plurality of doped semiconductor layers over the substrate on which the MEMS device is formed.

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