Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2011-05-31
2011-05-31
Chen, Jack (Department: 2893)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C359S295000
Reexamination Certificate
active
07951634
ABSTRACT:
A MEMS device such as an interferometric modulator includes an integrated ESD protection element capable of shunting to ground an excess current carried by an electrical conductor in the MEMS device. The protection element may be a diode and may be formed by depositing a plurality of doped semiconductor layers over the substrate on which the MEMS device is formed.
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Chen Jack
Knobbe Martens Olson & Bear LLP
QUALCOMM MEMS Technologies Inc.
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