Method and device for producing extreme ultraviolet...

Details Method and device for producing extreme ultraviolet... Method and device for producing extreme ultraviolet...

2003-06-27

2009-11-17

Berman, Jack I (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S503100, C250S493100

Reexamination Certificate

active

07619232

ABSTRACT:
A device for generating extreme ultraviolet (EUV) or soft X-ray radiation comprising: a laser source for producing a laser radiation which is focused to intensities beyond 106W/cm2onto a target to produce a plasma; and said electrodes located around the path of the plasma produced by the laser source; and said electrodes being combined with components for producing a rapid electric discharge in the plasma with a characteristic time constant which is less than the time constant of the laser produced plasma expansion time.

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patent: 2005/0230645 (2005-10-01), Melnychuk et al.
patent: WO 99/34395 (1999-07-01), None
patent: WO 01/30122 (2001-04-01), None
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patent: WO 02 085080 (2002-10-01), None
patent: WO 02/091807 (2002-11-01), None

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