Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate
2006-10-24
2006-10-24
Berman, Jack I. (Department: 2881)
Radiant energy
Radiant energy generation and sources
With radiation modifying member
Reexamination Certificate
active
07126143
ABSTRACT:
A method for generating extreme ultraviolet radiation and soft x-ray radiation with a gas discharge operated on the left branch of the Paschen curve, in particular, for EUV lithography,wherein a discharge chamber (10) of a predetermined gas pressure and two electrodes (11, 12) are used, wherein the electrodes have an opening (14, 15), respectively, positioned on the same symmetry axis (13) and, in the course of a voltage increase (16) upon reaching a predetermined ignition voltage (Uz), generate a plasma (17) located in the area between their openings (14, 15), which plasma is a source of the radiation (17′) to be generated,wherein an ignition of the plasma (17) is realized by affecting the gas pressure and/or by triggering,and wherein, with the ignition of the plasma (17), an energy storage device supplies by means of the electrodes (11, 12) stored energy into the plasma (17), characterized in that the ignition of the plasma (17) is realized by using a predetermined ignition delay (18).
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Bergmann Klaus
Klein Jürgen
Löken Michael
Neff Willi
Pankert Joseph
Berman Jack I.
Fraunhofer-Gesellschaft zur Förderung der angewandten Forsc
Huckett Gudrun E.
Koninklijke Philips Electronics , N.V.
Philips Corporate Intellectual Property GmbH
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