Method and device for preparing cleaning solution

Details Method and device for preparing cleaning solution Method and device for preparing cleaning solution

1998-06-24

2000-07-11

Bushey, C. Scott

Gas and liquid contact apparatus

Contact devices

Liquid tank

96202, 96244, 210750, B01F 304

Patent

active

06086057&

ABSTRACT:
A cleaning solution preparation device includes a deionized water supply source, a gas supply source, a gas-dissolving unit, and a gas supply pressure controller. The gas supply source supplies any of an oxidative gas, a reductive gas, an inert gas, a mixed gas of an oxidative gas and an inert gas, or a mixed gas of a reductive gas and an inert gas. The gas-dissolving unit dissolves the gas supplied from the gas supply source in deionized water supplied from the deionized water supply source to supply a gas-dissolved cleaning solution to objects to be cleaned. The gas supply pressure controller controls the pressure of the supplied gas at a value exceeding the atmospheric pressure when dissolving the gas in the deionized water.

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patent: 5776296 (1998-07-01), Matthews
patent: 5928573 (1999-07-01), Spencer et al.

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