Optics: measuring and testing – By light interference – Having polarization
Reexamination Certificate
2007-04-30
2010-10-05
Lyons, Michael A (Department: 2877)
Optics: measuring and testing
By light interference
Having polarization
C356S511000
Reexamination Certificate
active
07808648
ABSTRACT:
A method and device for optical determination of physical properties of features, not much larger than the optical wavelength used, on a test sample are described. A beam is split into reference and illuminating beams having known polarization. The test sample is exposed to the illuminating beam and recombined to form an image. The image is detected using at least one sensor, which may be cameras. A point-to-point map of polarization, phase and power is extracted from data representing the image. Optionally, the sensor may be a camera. The sensor may detect at least three optical parameters, such as a Stokes vector, a Jones vector, a Jones matrix, a Mueller matrix or a coherency matrix.
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Beffel, Jr. Ernest J.
Haynes Beffel & Wolfeld LLP
Lyons Michael A
Micronic Laser Systems AB
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