Optics: measuring and testing – Inspection of flaws or impurities – Having predetermined light transmission regions
Reexamination Certificate
2007-11-27
2007-11-27
Stafira, Michael P. (Department: 2886)
Optics: measuring and testing
Inspection of flaws or impurities
Having predetermined light transmission regions
Reexamination Certificate
active
11463412
ABSTRACT:
Method for fabricating and inspecting small holes in a material are disclosed. The method includes directing light onto the material and through the holes formed in the material, and then collecting the light passing through the holes in the material onto a detector. The methods further include analyzing the light for properties of the holes, and modifying the process based these detected properties.
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Schuster Jeffrey A.
Srinivasan Sudarsan
Wilbanks Thor Miller
Aradigm Corporation
Bozicevic Karl
Bozicevic Field & Francis LLP
Stafira Michael P.
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