Method and device for measuring whether a process kit part...

Details Method and device for measuring whether a process kit part... Method and device for measuring whether a process kit part...

2006-05-09

2006-05-09

Guadalupe, Yaritza (Department: 2859)

Geometrical instruments

Gauge

Comparator

C033S501050, C033S567000, C073S865900

Reexamination Certificate

active

07040032

ABSTRACT:
A go no-go gauge and method for verifying whether a process kit part used within a plasma chamber of a plasma processing tool has accumulated excessive wear or deposits. The gauge includes a component for verifying whether a dimension of a process kit part feature violates a prescribed size tolerance, the violation indicating that the process kit part has accumulated excessive wear or deposits.

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